Nadia Machkour (National Institute of Standards and Technology)
Non-Parametric Estimation of Curvature and Uncertainty Analysis of the Geometry Measuring Machine (GEMM)
Friday 2:40-3:00, San Marino
Abstract:
The National Institute of Standards and Technology (NIST) is developing the Geometry Measuring Machine (GEMM) for free-form and aspheric surface metrology. Optical interferometry is a general, simple, and accurate method for form metrology of flat and spherical precision surfaces. However, interferometers are not well suited to testing free form and aspheric surfaces. The reason is that, unlike flat and spherical optics, a reference wavefront is difficult to generate. The idea behind GEMM is to reconstruct the profile of a surface under test from its local curvature measurements. In Euclidean spaces, curvature is an intrinsic property of curves and surfaces; and it is invariant under Euclidean motions, which means curvature is independent of the part position and angular orientation. In principle, the profile of a test part is given by solving a second-order differential equation involving curvature, though there remain challenging engineering and signal processing hurdles to overcome in order to realize this differential geometry theory.
To measure the curvature of a test part, GEMM uses a small interferometer, which looks at a small area of the test part to measure the topography. The local topography measurements are fitted to a circle close to the center of the field of view; the curvature of this circle is then assigned to that point on the test surface. Other mathematical model, such as polynomial function, can also be used; in this case the curvature can be deduced from simple derivation of the mathematical function. However, the GEMM-based profile reconstruction is sensitive to the uncertainties in the curvature estimation, and in order to improve the existing results and to provide a theoretical foundation, a nonparametric statistical theory of curvature estimation is being developed using high-order local polynomial regression. The application of this theory to the GEMM method will be illustrated with the measurement of the form of a free-form mirror. In addition, a comparison will be made to parallel measurements which were made using the NIST Moore coordinate measuring machine.